Model: ThermCo
Manufacturer: ThermCo
Area: MiNaLab Clean Room

Material Class:

 Si, SiC

Technology Description:

 

 Conventional tube furnaces for oxidation (dry, wet) and heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.

Technical Information:

 Temperature range: 400-1150C

Tube 1:SiC Oxidation; Tube 2:Si Oxidation; Tube 3:Si High Temp. Annealing;

Tube 4:Si Contact Annealing

Materials: Si; SiC

Ambient: O2; N2; H2N2 (FORMIER 10)

 

Contact:

Viktor Bobal

Senior Engineer

UiO MiNaLab

Responsible for the ion beam techniques as UiO MiNaLab, as well as the thermal processes. In addition tool responsible on multiple tools.

+47 90713892
v.m.bobal@fys.uio.no