NTNU NanoLab
UiO MiNaLab
USN MST-Lab
SINTEF MiNaLab
USN MST-Lab
Location: USN, Vestfold
Cleanroom size: 400 m²
The MST-Lab is a flexible cleanroom facility for MEMS processes on silicon wafers and other substrates with emphasize on bonding, packaging and Micro-System-Technology. Therefore the laboratory also contains advanced tools for testing, dicing, pick and place, fine-pitch wire bonding and different flip chip methods. In addition, IMST has laboratories for: material preparation and characterization, microsystem measurements (electrically and optically) and BioMEMS research like assembly, packaging and testing of lab-on-chip and microfluidic microsystems.
Technologies and equipment at USN MST-Lab
Wet process benches
Fume Hood 6-Thermal processes
Autoclave, TuttnauerClimate Cabinet (Weiss)Climate test chamberCNT-reactorCryofreezerShow more
Freeze-drierHigh temperature furnaceMTI Vacuum ovenOven Binder 961Oven Binder 961Oven Binder MB6Oven TermaksOxidation Oven Harmbridge HiTech furnacePost Cure ChamberSAFTherm 1700°C ovenTemp Chamber Heraeus KendroTemp chamber Heraeus KendroTemp chamber Lenton 202Temperature Shock chamberThermal Chamber Heraeus T6200Thermal Chamber, Heraeus WötschThermal Chamber Thermaks TS4115Thermoshaker TS-100Tube furnace 2″ (new), For Annealing & CVDTube Furnace High Temperature 2″Lithography
Fume Hood 4 for General SolventsFume Hood 5 for corrosive chemicalsFume hood 7 – CorrosiveMask Aligner EVG 620Mask Aligner – Karl Suss MA56Show more
Maskless alignerRinse and dry STI SemitoolSpinner 1 Semitool 1Spinner 2 AB Plast Spin 150Spinner PolosSpinner, Spin 150iWet Etching AB PlastCharacterisation
Acoustic material characterisationAcoustic Pulse-Echo measurementsAFM XE-200Profilometer Bruker Dektak XTDSC Calorimeter Perkin Elmer DSC4000Show more
Electrochemical Workstation Zahner ZenniumElipsometerFTIRGas chromatograph,ShimadzuGas Cromatograph, ThermoFisherHall InstrumentHe- Leak DetectorImpedance measurementInterferometer Wyko NT9100DSC Calorimeter 8500 (SINTEF)Laser Vibrometer Lyncee interferometerOptical Microscope I Leica DM4000MOptical Microscope II Neophot 32Optical microscope Leica DM3 XLOptical Microscope Olympus IX51/TH4-200Optical Microscope Olympus MVX10Probe Station, Pasific WesternProbe Station PWS Probe IIProbe station RFProbestation Cryo, LakeshoreProfilometer DEKTAK 150SAM 300, PVA TePLAScanning tank, OndaSEM Hitachi SU 3500SEM Hitachi SU 8230Spectrofluorometer FS5Spektrometer Optima 2100XRDXRFBonding and packaging
Wire bonder Ball – TPT HB100Bond pull tester MicropullCritical Point DryerDie Attach Laurier Inc.Die Bonder, TPTShow more
Flip-chip bonder FinePlacer Pico (Automatic Force 2-700 N)Flip-chip bonder FinePlacer Pico (Manual Force 1-40 N)IR-Camera Pixelink PL-B74EFOptical Microscope, Zeiss V12Shear tester Delvotec 5600Shear Bond TesterUltrasonic bath FB15051Ultrasonic Cleaning BrandsonVacuum packerVacuum welder, BudatecWafer Bonding System EVG 501Wire bonder TPT HB16 (Ball)Wire Bonder (Ball) Delvotec 5610Wire bonder(wedge), TPT HB12Wirebonder (Ball) manual Delvotek5410Other
AutoclaveBio-bench 1Bio-bench 2Bio-bench 3Bio-bench 4Show more
Bio-bench 5Bio-bench 6Bio-bench 7 (ultrasound)Bio-bench 8 (ultrasound)Bio-bench 9 (ultrasound)Biological Safety Cabinet 2 BIOBiological Safety Cabinet 3 BIOCentrifuge Eppendorf 5702RCentrifuge MiniSpinCFX Opus 96 Real-Time PCR SystemCleaner BioTek ELX50Consort Multi-parameter analyserDicing saw DAD3360Dicing Saw, Disco 321Dicing saw Disco DAD-2H/6TDicing saw, Disco DAD 3220Dispencer Chemyx Micro Syringe pump 1EdvocyclerElectrochemical workstation Zahner IM6Electrochemical Workstation BIO Logic SASElektro PhoresisElektro PhoresisFume Hood 1- BiochemistryFume Hood 2 – BiochemistryFume Hood 3 – BiochemistryFumehood nr 8 for Gold etchingGloveboxHF/BOE etcherIncubator Binder CB150Incubator LabnetIncubator, Orbital shakerLaminar flow bench 1 BIOLaser Cutting MachineLaser Welder, ElettrolaserOptical LabPoint welderQubitReader 1 Tecan Spectra FluorReader 2 Bio Tek Synergy2Screen printerShaker GFL 3005Shaker, LDS PA2000Speed Mixer DAC 150 FVZ-KStepOnePlus real-time PCRUV Photospectrometer, ShimadzuVacuum Chamber
