NTNU NanoLab
UiO MiNaLab
USN MST-Lab
SINTEF MiNaLab
UiO MiNaLab
Location: UiO, Oslo
Cleanroom size: 440 m2
The UiO MiNaLab consists of one cleanroom floor and six laboratories with advanced synthesis, processing and analytical equipment, particularly suitable for semiconductors and material science. The facilities are hosted by the LENS group at Dept. of Physics, focusing on application-motivated basic research within semiconductor physics. The most essential research areas are solar cell technology, semiconductor nanoscience and -technology, MOEMS, wide bandgap semiconductors and transparent conductive oxides.
Technologies and equipment at UiO MiNaLab
Thin film deposition
E-beam and thermal PVD – AngstromAtomic layer deposition (ALD)Magnetron sputter DC/RF/HiPIMS – Flextura Gate 2Magnetron sputter Remote plasma – Flextura Gate 3Magnetron sputter DC/RF – MoorfieldShow more
Magnetron sputter DC/RF – NanoPVDPulsed laser deposition – Combinatorial chamberPulsed laser deposition – Epitaxial chamberMagnetron sputter DC/RF – SemicoreThermal evaporatorE-beam PVD – TornadoThermal processes
3-zone furnaceTube furnace – Big blueTube furnace – BirkelandAnnealing chamber – Flextura Gate 6Tube furnace – LindbergShow more
Rapid Thermal Processing (RTP) – MicroRapid Thermal Processing (RTP) – OneTube furnace – Small blueTube 1 – 4-stack furnaceTube 2 – 4-stack furnaceTube 3 – 4-stack furnaceTube 4 – 4-stack furnaceWarm cabinetDry etch
Reactive Ion Etch (RIE)Characterisation
4-point probeCathodoluminescenceEllipsometerAngular-resolved UV photoemission spectroscopy (UPS) / (ARPES) – Flextura Gate 5Low energy electron diffraction (LEED) – Flextura Gate 5Show more
X-ray photoemission spectroscopy (XPS) – Flextura Gate 5FT-IRSEM & EDS IT-300Hall effect – Low-temperature (Cleanroom)Probe stationQSSPCRutherford backscattering spectrometry (RBS)Hall effect – Room-temperature (Cleanroom)Hall effect – Room-temperature (MEMS room)Solar simulatorSpectrophotometerStylus profiler – Clean roomStylus profilometer – SIMS roomHall effect – Variable-temperature (MEMS room)X-ray Diffraction – Rigaku SmartLabXRD
