Model: Flextura
Manufacturer: Specs
Area: Clean Room

Instrument model:

Custom made analysis chamber by SPECS and Polyteknik

Technology Description:

The Flextrua cluster growth tool at the Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is connected to an analysis chamber for advanced sample characterization. A plethora of concomitant surface science techniques are available that utilise a variety of photon sources, a state-of-the-art hemispherical electron analyser and low energy electron diffraction optics. The LEED system can resolve the crystalline structure from the top few nanometers of the sample surface.

Technical Information:

System manipulator: Motorised sample manipulator accommodating up to 20 samples with max dimensions of 10x10x1 mm samples. Smaller surface area samples can be measured down to 3×3 mm. LEED analysis on all samples pockets possible.

Low vacuum: 5×10-7 – 5×10-10 mBar base pressure.

Source: Er-LEED 3000 Low energy electron diffraction optics 10-3000 eV kinetic energies.

Lateral resolution: 0.01 mm.


Vegard Skiftestad Olsen

Lab Manager

UiO MiNaLab

Lab manager responsible for the operation of UiO MiNaLab, including lab management and procurement of new instruments. In addition I am also one of the main responsible for the thin film deposition by sputtering, as well as the XRD and Hall characterization methods.

+47 991 59 872