Model: Twin 4" and 6"
Manufacturer: EMS
Area: Lithography & Wet Etch

Two seperate hotplates controlled by the same interlock/LIMS Tool ID.

Contact:

Mark Chiappa

Senior Engineer

NTNU NanoLab

Responsible for ultra violet lithography, electron beam lithography at NTNU NanoLab.

‭+47 91897617‬
mark.chiappa@ntnu.no