Model: PVD 200
Manufacturer: K.J. Lesker
Area: Thin Film & Dry Etch
The Lesker E-beam evaporator is the newest evaporator in NanoLab. It is a tool dedicated for metal evaporation. The machine is fully automated and therefore very user friendly. Sample loading is easy and pump down time is fast.
Specifications:
- 8 x 20 cc material pockets
- Sample size up to 6 inch in diameter
- Available targets: Ti, Au, Al, Cu, Pt, Cr, NiFe (other metals on request)
- Deposition rate: 1 – 5Å/s (depending on material)
- Film thickness: 0,5 nm – few hundred nm (depending on material)