{"id":650,"date":"2022-05-30T14:08:17","date_gmt":"2022-05-30T12:08:17","guid":{"rendered":"https:\/\/norfab.no\/technology\/mla-100\/"},"modified":"2024-05-02T11:53:58","modified_gmt":"2024-05-02T09:53:58","slug":"mla-100","status":"publish","type":"technology","link":"https:\/\/norfab.no\/technology\/mla-100\/","title":{"rendered":"MLA 100"},"content":{"rendered":"<p>The MLA100 Maskless aligner is a direct write tool. It&rsquo;s the little brother to our MLA 150. The illumination is provided by a 10W 365nm UV LED so all NanoLab photoresists are compatible with the system. Capable of exposing substrates from 5mm X 5mm up to full 5&rdquo; wafers or masks. Substrate thickness must be between 0.1 and 5mm. The system has a topside alignment accuracy of 1&micro;m.&nbsp; &nbsp;Minimum line width is 1&micro;m. The system accepts GDSII, CIF, BMP and DXF formats.&nbsp; It&rsquo;s also capable greyscale lithography.<\/p>\n","protected":false},"featured_media":6149,"template":"","labs":[5],"tech_cat":[16],"acf":[],"_links":{"self":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/technology\/650"}],"collection":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/technology"}],"about":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/types\/technology"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/media\/6149"}],"wp:attachment":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/media?parent=650"}],"wp:term":[{"taxonomy":"labs","embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/labs?post=650"},{"taxonomy":"tech_cat","embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/tech_cat?post=650"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}