{"id":528,"date":"2022-05-30T14:07:03","date_gmt":"2022-05-30T12:07:03","guid":{"rendered":"https:\/\/norfab.no\/technology\/moorfield-dc-rf-magnetron-sputter\/"},"modified":"2024-04-28T11:53:25","modified_gmt":"2024-04-28T09:53:25","slug":"moorfield-dc-rf-magnetron-sputter","status":"publish","type":"technology","link":"https:\/\/norfab.no\/technology\/moorfield-dc-rf-magnetron-sputter\/","title":{"rendered":"Magnetron sputter DC\/RF &#8211; Moorfield"},"content":{"rendered":"<table border=\"0\" cellpadding=\"2\" cellspacing=\"2\">\n<tbody>\n<tr>\n<td>\n<p><strong>Instrument model:<\/strong><\/p>\n<\/td>\n<td>Moorfield MiniLab<\/td>\n<\/tr>\n<tr>\n<td>\n<p><strong>Technology Description:<\/strong><\/p>\n<\/td>\n<td>Magnetron sputtering is a technique which can be used for thin film deposition with a wide range of materials &ndash; in principle any solid metal or alloy and a variety of compounds. Sputtering is the removal of atomized material from a solid due to energetic bombardment of its surface layers by ions or neutral particles. The Moorfield offers co-deposition of three targets, and multilayer films without breaking vacuum. The Moorfield is intended for processes which are &quot;dirtyer&quot;, i.e. all processes which are not epitaxial or involve materials which are not allowed in the Semicore or Flextura.<\/td>\n<\/tr>\n<tr>\n<td>\n<p><strong>Technical Information:<\/strong><\/p>\n<\/td>\n<td>\n<p><strong>Sources<\/strong>: 1 DC and 2 RF<\/p>\n<p><strong>Target size<\/strong>: 3 x 3&rdquo;<\/p>\n<p><strong>Substrate size:<\/strong> 4&rdquo; Single wafer chamber, but smaller samples can be mounted on the sample holder.<\/p>\n<p><strong>Substrate heating:<\/strong>&nbsp;20 &ordm;C &#8211; 600&nbsp;&ordm;C<\/p>\n<p><strong>Gas:<\/strong>&nbsp;Ar, N<sub>2<\/sub>&nbsp;and O<sub>2<\/sub><\/p>\n<p><strong>Materials:<\/strong>&nbsp;wide range of materials allowed, including metal oxides, metal nitrides and metal coatings.&nbsp;<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":5801,"template":"","labs":[6],"tech_cat":[9],"acf":[],"_links":{"self":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/technology\/528"}],"collection":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/technology"}],"about":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/types\/technology"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/media\/5801"}],"wp:attachment":[{"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/media?parent=528"}],"wp:term":[{"taxonomy":"labs","embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/labs?post=528"},{"taxonomy":"tech_cat","embeddable":true,"href":"https:\/\/norfab.no\/wp-json\/wp\/v2\/tech_cat?post=528"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}