Time-of-flight elastic recoil detection analysis (ToF-ERDA)

Technology Description:

Time-of-flight elastic recoil detection analysis (ToF-ERDA) is an ion beam analysis technique that is typically used to determine the elemental composition of thin layers. A heavy ion beam (typically Cl or Cu) impinges on the sample, and recoiled atoms are detected by a time-of-flight detector and gas ionisation chamber in combination, completely determining their atomic masses and velocities. From this, the elemental composition and depth profiles of thin films can be determined.

Note: This instrument uses the tandem accelerator, which must be operated by a MiNaLab engineer. Contact Viktor Bobal or Frode Strand to discuss beam requirements and scheduling.

Technical Information:

Elements detected: H-U, most sensitive for light elements i.e., H, Li, B, C, N, O

Detection limits: ~0.1 at.%

Depth of analysis: < 200 nm.

Depth resolution: 5  nm.

Non-destructive.

Quantitative without standards.

Samples: Vacuum compatible materials.

Sample sizes: 10 × 10 mm (standard).