Model: BAE 250
Manufacturer: Balzers
Area: MiNaLab Clean Room

Material Class:

Vacuumcompatible solids

Technology Description:

Conventional thermal evaporation chamber for resistive heating and evaporation of metals onto a target. The e-beam evaporator at UiO MiNaLab can only deposit one metal during one cycle.

Technical Information:

Type: Balzers BAE 250 coating system

Ultimate vacuum: 1 x 10-6 mbar.

Metals: Al, Au, Ag, Ni, Zn, Sn, In

 

Contact:

Viktor Bobal

Senior Engineer

UiO MiNaLab

Responsible for the ion beam techniques as UiO MiNaLab, as well as the thermal processes. In addition tool responsible on multiple tools.

+47 90713892
v.m.bobal@fys.uio.no