Model: Pegasus S200FA
Manufacturer: Wentworth Laboratories
Area: MiNaLab Probe room

Technology Description:

 

  This semi-automatic system has four probes and the ability to measure currents down to the pA-range. It may handle wafers up to 8” in size and has a reproducibility of ±4µm. This programmable system may be used for efficient electrical characterization (like CV and IV) on the wafer level.

Technical Information:

 Type: Pegasus S200FA. Wentworth Laboratories

Agilent 4284A precision LCR meter (20Hz- 1MHz)

Keithley 617 programmable electrometer

Keithley 2440 5A Sourcemeter

Contact:

Viktor Bobal

Senior Engineer

UiO MiNaLab

Responsible for the ion beam techniques as UiO MiNaLab, as well as the thermal processes. In addition tool responsible on multiple tools.

+47 90713892
v.m.bobal@fys.uio.no