The semi-automatic probe tester, PWS Probe II, has a motorized chuch for x-y motion and theta rotation stepwise or continuous. The microscope has a zoom in possibility and large movement possibility in the z direction (focus). The probe station may be equipped with probe-cards or until four Suss Microtech PH100 probers for x-y-z adjustment. The platform is also adjustable in z-direction. For IV measurements, a 2 channel power supply, Keithley 2602, is used.