Model: SCIL
Manufacturer: Karl Süss
Area: Lithography & Wet Etch

SCIL (Substrate Conformal Imprint Lithography) is a technique for large area imprint. We use a PDMS replica made from a master mold which is bonded to a piece of thin glass as a working stamp.  At NanoLab we have all the tooling to make stamps up to 6”.



Mark Chiappa

Senior Engineer

NTNU NanoLab

Responsible for ultra violet lithography, electron beam lithography at NTNU NanoLab.

‭+47 91897617‬