Model: SCIL
Manufacturer: Karl Süss
Area: Lithography & Wet Etch

SCIL (Substrate Conformal Imprint Lithography) is a technique for large area imprint. We use a PDMS replica made from a master mold which is bonded to a piece of thin glass as a working stamp.  At NanoLab we have all the tooling to make stamps up to 6”.

 

Contact:

Mark Chiappa

Senior Engineer

NTNU NanoLab

Responsible for ultra violet lithography, electron beam lithography at NTNU NanoLab.

‭+47 91897617‬
mark.chiappa@ntnu.no