Model: XR-50 Twin anode
Manufacturer: Specs
Area: MiNaLab Clean Room

Instrument model:

 Custom made analysis chamber by SPECS and Polyteknik

Technology Description:

The Flextrua cluster growth tool at the Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is connected to an analysis chamber for advanced sample characterization. A plethora of concomitant surface science techniques are available that utilise a variety of photon sources, a state-of-the-art hemispherical electron analyser and low energy electron diffraction optics. The XPS system can resolve the chemical composition (stoichiometry) and elemental chemical environment.

Technical Information:

System manipulator: Motorised sample manipulator accommodating up to 20 samples with max dimensions of 10x10x1 mm samples. Smaller surface area samples can be measured down to 3×3 mm. XPS analysis on all samples pockets possible.

Low vacuum: 5×10-7 – 5×10-10 mBar base pressure.

Source: XR-50 Twin anode X-ray source for 1253.6 eV and 1486.7 eV photons.

Analyser: PHOIBOS 150 hemisphere electron analyser and 2D CCD detector with real space and angle resolving lens modes.

XPS resolution: 0.2 eV.

Lateral resolution: 0.01 mm.

Contact:

Vegard Skiftestad Olsen

Lab Manager

UiO MiNaLab

Lab manager responsible for the operation of UiO MiNaLab, including lab management and procurement of new instruments. In addition I am also one of the main responsible for the thin film deposition by sputtering, as well as the XRD and Hall characterization methods.

+47 991 59 872
v.s.olsen@smn.uio.no