Material Class: |
Transparent solids |
Technology Description: |
Ellipsometry can probe the complex refractive index or dielectric function tensor, which gives access to fundamental physical parameters and is related to a variety of sample properties. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from a nanometers to several micrometers. |
Technical Information: |
Type: Woolam Alpha SE.
Spectral range: 380 – 900 nm. Angle of incidence: 65º, 70º, 75º, or 90º. Data accousition rates: 3 sec (Fast mode), 10 sec (Standard mode), 30 sec (High precision mode). Beam diameter: ~3mm. |