E Beam Evaporator – K.J. Lesker

The Lesker E-beam evaporator is the newest e-beam evaporator in NanoLab. It is a tool dedicated for metal evaporation. The machine is fully automated and therefore very user friendly. Sample loading is easy and pump down time is fast, as well as the process time.

Specifications:

• 8 x 20 cc material pockets
• Sample size up to 6 inch in diameter
• Available targets: Ti, Au, Al, Cu, Pt, Cr, NiFe (other metals on request)
• Deposition rate: 1 – 5Å/s (depending on material)
• Film thickness: 0,5 nm – few hundred nm (depending on material)