Model: 75242
Manufacturer: Gero
Area: MiNaLab Clean Room

Material Class:

Dedicated to SiC

Technology Description:

 

Conventional tube furnaces for heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C. Several of the furnaces are dedicated to  specific materials, see specifications below:

Technical Information:

Temperature range: 25-1800C

Alumina tube / Quartz tube

 

Contact:

Viktor Bobal

Senior Engineer

UiO MiNaLab

Responsible for the ion beam techniques as UiO MiNaLab, as well as the thermal processes. In addition tool responsible on multiple tools.

+47 90713892
v.m.bobal@fys.uio.no