Technologies
Bonding and packaging
Characterisation
Chemical methods
Dry etch
Lithography
Sample preparation
Thermal processes
Thin film deposition
Labs
NTNU NanoLab
UiO MiNaLab
USN MST-Lab
SINTEF MiNaLab
Highlights
Access & Pricing
About
About Norfab
Contact us
Employees
LIMS
UiO
NTNU
USN
MENU
Technologies
Bonding and packaging
Characterisation
Chemical methods
Dry etch
Lithography
Sample preparation
Thermal processes
Thin film deposition
Labs
NTNU NanoLab
UiO MiNaLab
USN MST-Lab
SINTEF MiNaLab
Highlights
Access & Pricing
About
About Norfab
Contact us
Employees
LIMS
NTNU
USN
UiO
SINTEF MiNaLab
MENU
Home
»
Technologies
»
Thin film deposition
AlN sputter
Model:
Endeavor M1
Manufacturer:
Plasmatherm
Area:
G2-33 Cleanroom
NTNU NanoLab
UiO MiNaLab
USN MST-Lab
SINTEF MiNaLab
