Model: TSK A-PM-90A
Manufacturer: ACCRETECH (Tokyo Seimitsu Kogaku) A-PM-90A
Area: Clean room


Sample specifications:

  • 100 mm and 150 mm Si wafers
  • Si/SiO2/SixNy
  • Al/W/Ti
  • Glass (with exceptions)
  • Polymers (with exceptions)
  • Noble metals (with exceptions)

Tool description:
The TSK A-PM-90A is an automatic probing station for electrical characterization – on wafer level. Loading of wafers is done by robots from cassettes. Manual loading is also possible. Two nearly identical machines are installed at SINTEF MiNaLab.

Technical information:

  • Fully automatic wafer probing machine
  • Automatic wafer load/unload
  • Probe-to-pad-alignment
  • Closed-loop positioning
  • High-payload Z
  • Probe mark inspection
  • Ink dot inspection
  • Real-time-wafer-mapping
  • Optical character recognition
  • High voltage probing up to 1100V
  • Temperature controlled chuck