Automatic Probe Station TSK

Booking:
MiNaLab@sintef.no

Sample specifications:

• 100 mm and 150 mm Si wafers
• Si/SiO₂/Si_xN_y
• Al/W/Ti
• Glass (with exceptions)
• Polymers (with exceptions)
• Noble metals (with exceptions)

Tool description:
The TSK A-PM-90A is an automatic probing station for electrical characterization – on wafer level. Loading of wafers is done by robots from cassettes. Manual loading is also possible. Two nearly identical machines are installed at SINTEF MiNaLab.

Technical information:

• Fully automatic wafer probing machine
• Automatic wafer load/unload
• Probe-to-pad-alignment
• Closed-loop positioning
• High-payload Z
• Probe mark inspection
• Ink dot inspection
• Real-time-wafer-mapping
• Optical character recognition
• High voltage probing up to 1100V
• Temperature controlled chuck